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半球深腔的加工质量是决定硅基MEMS半球陀螺精度的关键因素之一,及时检测半球深腔的形貌参数并将其反馈至加工过程,是确保高性能MEMS半球陀螺研制成功的重要措施。由于硅半球深腔的深度较大,台阶仪和光学显微成像系统无法对半球深腔的形貌特征进行有效测量。因此,需要将硅深腔结构剖开后采用扫描电镜(SEM)进行检测。这种检测方式时间周期长,且属于破坏性的样本检测,效率和测试精度都较低。提出以硅半球深腔为模具,利用PDMS铸模将硅半球深腔的结构尺寸和表面形貌转移到PDMS凸起的半球模型上,通过检测PDMS半球模型的尺寸结构和表面形貌,即可反推出硅半球深腔的尺寸特征。经实验验证,脱模后的PDMS模型可以准确地反映出半球深腔的尺寸信息,测量结果的不确定度小于5‰,有效解决了硅半球深腔无损检测的难题。 相似文献
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Experimental investigation of large amplitude yaw-roll coupled oscillations was conducted in a low-speed wind tunnel using an aircraft configuration model. A special test rig was designed and constructed to provide different coupled motions from low to high angles of attack.A parameter ‘‘coupling ratio" was introduced to indicate the extent of yaw-roll coupling. At each pitch angle, seven coupling ratios were designed to study the yaw-roll coupling effects on the lateraldirectional aerodynamic characteristics systematically. At high angles of attack, the damping characteristics of yawing and rolling moments drastically varied with coupling ratios. In the coupled motions with the rotation taking place about the wind axis, the lateral-directional aerodynamic moments exhibited unsteady characteristics and were different from the ‘‘quasi-steady" results of the rotary balance tests. The calculated results of the traditional aerodynamic derivative method were also compared with the experimental data. At low and very high angles of attack, the aerodynamic derivative method was applicative. However, within a wide range of angles of attack, the calculated results of aerodynamic derivative method were inconsistent with the experimental data, due to the drastic changes of damping characteristics of lateral-directional aerodynamic moments with yaw-roll coupling ratios. 相似文献
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《Advances in Space Research (includes Cospar's Information Bulletin, Space Research Today)》2019,63(11):3721-3737
Impact craters are among the most noticeable geomorphological features on the planetary surface and yield significant information about terrain evolution and the history of the solar system. Thus, the recognition of impact craters is an important branch of modern planetary studies. Aiming at addressing problems associated with the insufficient and inaccurate detection of lunar impact craters, a decision fusion method within the Bayesian network (BN) framework is developed in this paper to handle multi-source information from both optical images and associated digital elevation model (DEM) data. First, we implement the edge-based method for efficiently searching crater candidates which are the image patches that can potentially contain impact craters. Secondly, the multi-source representations of an impact crater derived from both optical images and DEM data are proposed and constructed to quantitatively describe the two-dimensional (2D) and three-dimensional (3D) morphology, consisting of Histogram of Oriented Gradient (HOG), Histogram of Multi-scale Slope (HMS) and Histogram of Multi-scale Aspect (HMA). Finally, a BN-based framework integrates the multi-source representations of impact craters, which can provide reductant and complementary information, for distinguishing craters from non-craters. To evaluate the effectiveness and robustness of the proposed method, experiments were conducted on three lunar scenes using both orthoimages from the Lunar Reconnaissance Orbiter (LRO) and DEM data acquired by the Lunar Orbiter Laser Altimeter (LOLA). Experimental results demonstrate that integrating optical images with DEM data significantly decreases the number of false positives compared with using optical images alone, with F1-score of 84.8% on average. Moreover, compared with other existing fusion methods, our proposed method was quite advantageous especially for the detection of small-scale craters with diameters less than 1000 m. 相似文献
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应用压力敏感漆技术,在平板上测量了不同主流攻角(i=-30°,-20°,-10°,0°,10°,20°,30°)下双射流孔的气膜冷却效率,并利用计算流体动力学(CFD)计算得到的流场对气膜冷却效率的规律进行了解析。所研究的双射流孔结构的孔间无量纲横向距离为0.5,孔间无量纲流向距离为3;射流与主流密度比为1.0,吹风比分别为0.5、1.0、1.5、2.0。结果表明小的主流攻角(i=-10°,0°,10°)下,流场中存在反肾型涡对或挤压作用,气膜层与壁面贴附良好,气膜冷却效率最高;大正值攻角(i=20°,30°)下,虽然气膜覆盖面积大,但反肾型涡对退化,气膜冷却效率下降;大负值攻角(i=-20°,-30°)下,流场中有肾型涡对,且气膜横向覆盖受限,气膜冷却效率最低。 相似文献
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针对目标偏振二向反射特性研究中模型参数难以准确确定的问题,分析了粗糙表面偏振二向反射分布函数的影响参数,并通过理论推导和仿真计算,研究了各参数对粗糙表面散射特性的作用机理。总结分析了现有参数反演方法,针对现有方法存在的理论缺陷,在P-G(Preist-Germer)模型的基础上,提出了利用"相对偏振分量-角度"的相关关系进行参数反演的方法,设计了参数反演算法,进行了标准反射板和绿漆表面的偏振二向反射特性测试实验,并根据实验数据进行了参数反演和模型验证。实验结果表明,改进的参数反演方法可准确反演所有模型参数。利用反演参数进行模型验证,结果显示模型预测数据与实验数据具有较好的吻合度,验证了模型的准确性。 相似文献
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HTPB固体推进剂老化性能检测新方法 总被引:4,自引:2,他引:2
引入了光致正电子湮灭分析方法 (PIPA,Photon Induced Positron Analysis),对HTPB固体推进剂老化性能进行检测研究。介绍了PIPA的原理、PIPA试验平台的搭建以及PIPA的数值处理方法,并用511KeV能谱的FWHM值ε(半高宽,Full Width Half Maximum)表征HTPB固体推进剂老化引起的微观变化,所得结论与固体推进剂的常规测试一致,证明了PIPA用于固体推进剂老化性能无损检测的可行性。 相似文献